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The FS2012 mass flow sensor module measures the flow across a sensing surface using the thermo-transfer (calorimetric) principle and is capable of measuring gas or liquid medium. Some key advantages over other flow solutions The sensor utilizes series of MEMS thermocouples, which provide excellent signal-to-noise ratio. The solid thermal isolation along with the silicon-carbide film coating offers excellent abrasive wear resistance and long-term reliability. The high temperature material used in the flow channel housing and base allows for a wide operating temperature. These features offer key advantages of the FS2012.
Wetted materials consist of a glass fiber-reinforced PA66 resin, epoxy, and silicon carbide.